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Evaporateur à effet de Joule
Modèle : PVD-4E
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Caractéristiques techniques
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photo
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Growth chamber
- Stainless steel-320 mm diameter cylindrical
- Frontal access door with viewport
- Full range pressure gauge
- 1 quartz microbalance
- Base pressure:10-7 mbar
- Pumping speed:<20 min,range in 10-6 mbar
- Pumping group:
- 16 m3/h rotary pump
- 250 L/s turbo pump
- Automated pumping and venting cycles
- Evaporation sources:
- Evaporation flange for 4 boats
- 2 evaporation sources
- 2 pneumatic shutters
- Quartz microbalance:
- Film thickness control
- Thickness reading precision 1Å
- Deposition rate reading precision 0,1Å/s
- Substrate holder manipulator:
- Up to 4 inches
- Continuous rotation (up to 20 rpm)
- Heating up to 250°C (IR Lamps)
- Supervisor: Full process control
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